코로나방전과 연X선을 이용한 정전기제거장치의 특성에 관한 연구

Abstract

A Study on Characteristics of Electrostatic Eliminator used Corona Discharge and Soft X-ray

Kwon, Sung Yul

Department of Safety Engineering, The Graduate School, Pukyong National University

Abstract The corona discharged type ionizer has not kept the electrostatic elimination performance when many particles have been deposited on its electrode surface, so must clean the electrode surface within the suitable period. This study is for solving the problem of corona discharged type ionizer using the soft X-ray type ionizer. Moreover, for improving the electrostatic elimination performance, the compressed air has been adopted on the soft X-ray ionizer for transference of ions to far away. The results are as following;

1) It appears that the electrostatic elimination performance of 30 Hz pulse AC corona discharged type ionizer has been rapidly lowered 9th weeks later. Therefore the surface of the electrode must be cleaned 9th weeks later.

2) It appears that the electrostatic elimination performance of piezo type ionizer has been rapidly lowered 39th weeks later. Therefore the surface of the electrode must be cleaned 39th weeks later

3) In case of soft X-ray ionizer, the electrostatic elimination performances, such as charge decay time and ion Balance, have been maintained during the 46th weeks. But soft X-ray is radioactive ray, the surround environment must be covered by perfect shielding materials.

4) To improve the electrostatic elimination performance of soft X-ray, on which compressed air was used for increasing the ion transference to far away. So the charge decay time characteristics was increased till 1.3 ~ 6.3 times compare to the conventional soft X-ray ionizer, which was not used compressed air. 5) In case of soft X-ray ionizer used compressed air, it is useful for the following processes; - LCD & Semiconductor process: Cr or organic BM layer process, R/G/B process(bake/development etc.), P/I coating process, rubbing process, ODF(one drop filling) process, Pol' attachment, P/R coating process. - The other process: high-speed film process, electrostatic elimination in the painting process, drying process, P/R lamination process in the PCB manufacture, mote process etc.

Related to the above research, the following future research in succession should be performed. - The development of corona discharged type ionizer having the cleaning cycle over 90th weeks. - The development of soft X-ray ionizer intrinsically excluded from danger of radiation exposure to the human being.