AMOLED와 TFT-LCD의 TFT 공정에서 정전기제거장치 적용사례에 관한 연구

Abstract

This paper demonstrates the study of what I found critically issued in the AMOLED and TFT-LCD industries and their possible product applications when manufacturing to raise the yield. With in-depth study of the subject, I narrow down the conclusion and the explanation of the cases as below. The both AMOLED and TFT-LCD manufacturing processes show that the high level of electro voltages are measured, for instance, 3,500[V] is created during the process in AMOLED TFT exposure/develop, and 2,700[V] is created in TFT-LCD exposure/develop. The voltage level differences are observed from the each structure of substance compositions. In TFT-LCD, a single TFT is driven by one pixel; instead it requires two or more TFTs to retrieve a single pixel to function. Therefore, more TFT get involved, the more electro voltage you expect in the field. In both processes, I have figured that there are 20[V] in AMOLED TFT and 25[V] in TFT-LCD when measuring residual voltage level in vapor deposition process. The measured values are safe enough to handle in the field since the levels are definitely lower than the safety voltage control standard. With these results, I can notice that the intense ways of managing voltage level will be taken into consideration when making high-resolution dqkisplay industry in the near future. If the equal amount of pixels has to be distributed on the equalizable surface in AMOLED and TFT-LCD, the electrostatic management of AMOLED must be reinforced drastically compared to TFT-LCD because consumption of TFT is highly correlated in this topic. The bottom line is that the X-Ray type static ionizer must be taken into consideration for their basic management tool over ordinary type of ionizer since the performance of the ESD controls are three times higher and it minimizes the weakness of general type of ionization.