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RF 마그네트론 스퍼터링법에 의한 ZnO/SiO₂/Si(100) 박막의 증착 및 특성에 관한 연

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Author(s)
김종완
Issued Date
1995
Type
Article
Publisher
부산수산대학교 기초과학연구소
URI
https://repository.pknu.ac.kr:8443/handle/2021.oak/20614
http://pknu.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001978172
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