초임계 이산화탄소를 이용한 나노입자 제조 및 반도체 나노입자 제거
- Abstract
- An efficient, simple, surfactant-free and solvent-free green synthesis of Peracetylated-b-cyclodextrin (PAc-β-CD) nano particle by using an environmentally benign supercritical carbon dioxide (scCO2)processes. Rapid expansions of supercritical solution(RESS) processes were used to precipitate PAc-β-CD nanoparticles. The effect of the concentration (0.05-0.5 wt/wt %), nozzle type and length (5-50mm) and internal diameter (ID) (50-150 mm) of capillary on particle size and particles morphology of PAc-β-CD nanoparticle were investigated at constant pressure of 34.5 MPa and temperature of 45 ℃. The obtained PAc-β-CD particle size and morphology was measured with Scanning electron microscopy (SEM). Among all of these experimental parameters 50 mm ID with 5 mm length capillary nozzle given particles size with 40 nm and with spherical shape and same way experimental conditions of orifice nozzle obtained good average particle size distribution with 0.5 wt% of PAc-β-CD supercritical solution in CO2. The Concentration of PAc-β-CD, capillary nozzle length and ID are shown significantly affected on particles size and nozzle type significantly effect on aggregation of particles and polydispersity.
- Author(s)
- 김용훈
- Issued Date
- 2019
- Awarded Date
- 2019. 2
- Type
- Dissertation
- Publisher
- 부경대학교
- URI
- https://repository.pknu.ac.kr:8443/handle/2021.oak/23391
http://pknu.dcollection.net/common/orgView/200000183672
- Affiliation
- 부경대학교 대학원
- Department
- 대학원 융합디스플레이공학과
- Advisor
- 임권택
- Table Of Contents
- 목차 ⅰ
List of Figures ⅲ
제1장. 서 론 1
1. 1. 초임계 유체 1
1. 2. 초임계 이산화탄소 2
제2장. RESS 공정을 이용한 Peracetylated-β-cyclodextrin의 나노입자 분포 6
2. 1. 서 론 8
2. 1. 1. 초임계 유체를 이용한 나노 입자의 제조 12
2. 1. 1. 1. RESS(Rapid Expansion of Supercritical Solutions) 12
2. 1. 1. 2. GAS (Gas Anti-Solvent), SAS (Supercritical fluid AntiSolvent), ASES (Aerosol Solvent Extraction System), SEDS (Solution Enhanced Dispersion by Supercritical Fluids) 15
2. 1. 1. 3. PGSS (Particles from Gas Saturated Solutions) 19
2. 1. 1. 4. RPSS (Reactive Precipitation in Supercritical Solution) 19
2. 2. 실 험 21
2. 2. 1. 시 약 21
2. 2. 2. 실험 장치 21
2. 2. 3. PAc-β-CD 나노입자의 합성 22
2. 2. 4. 분석 방법 22
2. 3. 결과 및 고찰 23
2. 3. 1. PAc-β-CD의 입자크기와 형태에 대한 RESS 매개 변수의 영향 23
2. 3. 1. 1. 노즐 길이에 따른 입자의 영향 26
2. 3. 1. 2. 분사 거리에 따른 영향 26
2. 3. 1. 3. 노즐 내경의 영향 29
2. 4. 결 론 31
제3장. 웨이퍼 표면의 Si3N4 파티클 제거를 위한 초임계 이산화탄소 세정 32
3. 1. 서 론 33
3. 2. 실 험 34
3. 2. 1. 실험 및 시약 34
3. 2. 2. 오염시료의 제작 36
3. 2. 3. 초임계 이산화탄소를 이용한 웨이퍼 세정 41
3. 3. 결과 및 토론 43
3. 3. 1. 공정 조건 확립 43
3. 3. 2. 계면활성제에 따른 파티클 제거 48
3. 3. 3. 바인더에 따른 파티클 제거 50
3. 4. 결론 60
참고문헌 62
- Degree
- Doctor
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