VO2 2 단자 소자 기반 자가 발진의 소자 규모에 따른 온도와 압력 반응 분석

Abstract

Here we demonstrate simultaneous measurement of temperature and pressure by utilizing two waveform parameters of voltage-induced oscillation generated in a two-terminal device based on a vanadium dioxide (VO2) thin film for the first time. Two oscillation waveform parameters indicate the oscillation frequency fo and the oscillation amplitude Ao. To create the voltage-induced oscillation, a closed-loop circuit was formed by serially connecting a VO2-based two-terminal device, an external resistor, and a DC power supply that acts as a DC voltage source. Simultaneous measurement was done using three devices with different dimensions: Devices I, II, and III have current channel widths of 3, 5, and 10 μm with a fixed electrode separation of 10 μm, respectively. For Devices I, II, and III, temperature sensitivities of fo and Ao were measured as 17.27, 17.50, and 17.69 kHz/°C and －0.163, －0.156, and －0.160 V/°C in a temperature range of 25－50 °C, respectively. Similarly, pressure sensitivities of fo and Ao were measured as 58.15, 58.48, and 59.08 kHz/MPa and －0.471, －0.451, and －0.450 V/MPa for Devices I, II, and III, respectively, in an applied pressure range of 0－5 MPa.