능동형 제진테이블의 외란억제를 위한 강인제어기 설계에 관한 연구

Abstract

In this study, the problem of suppressing uncertain and irregular disturbance from outside was studied. With the development of control technology, more stable and precise work is required. In order to satisfy these required characteristics a robust controller was designed to analyze the kinetic characteristics of the active vibration isolation table and suppress the influence of disturbance on the table to have the vibration characteristics even in the micro-level vibration area. In addition, the performance of the controller was evaluated to effectively perform the vibration suppression performance even in a general operating environment by configuring an active vibration isolation system in parallel. Therefore, in this study, the motion characteristics were identified through the experiment of applying disturbance to the active vibration isolation table. Here, the uncertainty of the model was analyzed and a robust controller was designed to suppress the uncertain and irregular disturbance of actual model. The proposed robust control system design method was applied to the experimental device and the vibration suppression performance of the controller was evaluated by applying various disturbances. From the results of this study, it was verified that the proposed control system design method can secure not only model uncertainty but also robustness against uncertain and irregular disturbance as well as control performance.