Sputtering法에 의한 Al薄膜의 形成 및 特性 評價= Evaluation of properties of Al Thin Films prepared by Sputtering
- Issued Date
- 2002
- Type
- Dissertation
- Publisher
- 부경대학교대학원
- Files in This Item:
-
-
Download
Sputtering法에 의한 Al薄膜의 形成 및 特性 評價= Evaluation of properties of Al Thin Films prepared by Sputtering.pdf
기타 데이터 / 2.31 MB / Adobe PDF
-
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.