WO3와 W 박막의 간섭 원리를 이용한 반사형 전기변색 소자

Abstract

In this study, a reflective electrochromic device using Fabry-Perot Cavity of WO3@W structure that can reproduce Multi Color in visible light region was studied. Using the Essential Macleod Program, it was possible to design a reflective display through various reflective layers. The Beta-W crystal structure has a high reflectivity by controlling DC Power and Working Pressure during sputtering deposition, and the Beta-W crystal structure is minimized so that it contains almost impurities, and sheet resistance can also be lowered by manufacturing Alpha-W, so it can be manufactured with a stable electrode even when entering and leaving electrons. By adjusting the deposition time of Tungsten oxide over the Tungsten reflective layer as a variable, various colors could be expressed by the Fabry-Perot interference phenomenon of countless Tungsten reflective layers and Tungsten oxide layers, and using the electrochromic characteristics of Tungsten oxide, a multi-color device could be manufactured even within one device. Furthermore, it was possible to serve as a color filter according to the user's purpose by using the Counter electrode.