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GUIDE OAK 국가리포지터리 부경대학교

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Alternative Title: Flow Characteristics and Development of Regulator for Clean Gas Supply System

Abstract: Flow characteristics at the regulator, which is very important for clean gas supply systems for semiconductors and LCD industries, are investigated. Numerical simulations are carried out to visualize flows at regulator for several flow rates, and to investigate pressure losses at the parts in a regulator which was produced by a company in Korea. New model of regulator is proposed in this paper, and numerical simulations are also carried out to visualize flows at regulator for several flow rates, and to investigate pressure losses at the parts in a new model.

URI: https://repository.pknu.ac.kr:8443/handle/2021.oak/3661
http://pknu.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001953584

Table Of Contents: 1. 서론 = 1
2. 기본 이론 = 3
2.1 압력조정기의 기본 구조 = 3
2.2 압력조정기의 종류 = 4
2.3 압력조정기의 작동원리 = 5
3. 수치해석법 = 6
3.1 지배방정식 = 6
3.2 난류 모델 = 8
3.3 표준k-ε모델 = 9
4. 수치시뮬레이션 = 12
5. 결과 및 고찰 = 20
5.1 기존모델(Type A) = 20
5.2 개선된 모델(Type B) = 36
5.3 개선된 모델(Type C) = 50
5.4 세 모델의 비교 분석 = 65
6. 결론 = 69
7. 참고문헌 = 70

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