REEL-TO-REEL 장치를 이용한 초전도체용 산화물 버퍼층 제작에 관한 연구
- Alternative Title
- The study of superconducting metal oxide buffer layer by reel-to-reel unit
- Abstract
- In this work, pure and rare earth ions doped yttrium oxide (Y2O3) substrate were prepared by a simple sol-gel process and reel-to-reel. Y2O3 were successfully synthesized by hydrolysis of yttrium acetate. The effects of Y2O3 concentration of the solution (0.1M, 0.4M, 0.6M) and the number of coatings on surface morphology and barrier capability against the diffusion from the metal tape were examined. The planarization process has the potential to lead to a reduction in buffer layers and alleviate the burden of hazardous waste generated from the electro-polishing process. It is capable of planarization of any substrate alloy, while electro-polishing is limited to only a few alloys. The properties of sample was analyzed by the means of atomic force microscope and scanning electron microscope. The Y2O3 film thickness increases with increasing the Y2O3 concentration in the solution, and the surface became smoother with increasing the number of coating cycles. Using this process we have achieved 1.3 nm and 0.68nm RMS roughness from a starting roughness of over 31 nm on 5 μm areas.
- Issued Date
- 2012
- Awarded Date
- 2012. 2
- Type
- Dissertation
- Publisher
- 부경대학교
- Alternative Author(s)
- Kang Boo Min
- Affiliation
- 부경대학교
- Department
- 대학원 공업화학과
- Advisor
- 박성수
- Table Of Contents
- Contents
Contents.......................................................................................................................ⅰ
List of Tables...........................................................................................................ⅲ
List of Figures..........................................................................................................ⅳ
List of Scheme..........................................................................................................ⅷ
Abstract.......................................................................................................................ⅸ
제 1 장. 서론..............................................................................................................1
제 2 장. 이론적 배경...............................................................................................3
2-1. 유/무기 하이브리드 코팅..............................................................................3
2-1-1. 졸-겔 공정.................................................................................................3
2-1-1-1. 입자의 성장형태................................................................................11
2-1-1-2. 겔화(Gelation) 및 숙성(Aging).....................................................14
2-1-1-3. 건조 및 균열방지..............................................................................16
2-1-2. 에어로겔.....................................................................................................17
2-1-2-1. 에어로겔 제조 공정..........................................................................18
2-1-2-2. 에어로겔의특성..................................................................................20
2-1-2-3 에어로겔의 향후 응용분야..............................................................22
2-1-3. 유/무기 하이브리드 재료......................................................................24
2-1-4. 기능성 코팅제..........................................................................................31
2-1-4-1. 하드코팅..............................................................................................31
2-1-4-2. 내후성코팅..........................................................................................33
2-1-4-3. 내오염/발수코팅................................................................................34
2-1-4-4. 정전기 방지코팅................................................................................35
2-1-4-5. 기체차단성코팅..................................................................................36
2-1-5. Y2O3 결정구조 및 특성..........................................................................37
2-2. 코팅공정............................................................................................................38
2-2-1. Spin coating..............................................................................................40
2-2-2. Dip coating...............................................................................................43
제 3 장. 실험............................................................................................................46
3-1. 시약 .................................................................................................................46
3-2. 코팅액 제조.....................................................................................................46
3-3. 용액증착평탄화 장비제작............................................................................48
3-4. 선재코팅 및 열처리.......................................................................................52
3-4-1. One step 공정에 의한 선재코팅.........................................................54
3-4-2. Two step 공정에 의한 선재코팅........................................................54
3-5. 특성분석...........................................................................................................55
3-5-1. Energy Dispersive Spectrometer........................................................55
3-5-2. X-ray Diffraction................. .................................................................55
3-5-3. Scanning Electron Microscopy...........................................................55
3-5-4. High-Resolution Transmission Electron Microscope..................56
3-5-5. Atomic Force Microscope...................................................................56
3-5-6. Auger Electron Spectroscope.............................................................56
제 4장 결과 및 고찰..............................................................................................57
4-1. 정성분석..........................................................................................................57
4-2. 결정학적 특성분석........................................................................................60
4-3. 표면 morphology 분석.................................................................................67
4-4. 코팅층 단면 분석..........................................................................................74
4-5. 표면 거칠기 분석..........................................................................................78
4-6. 표면 코팅층 depth profile 분석................................................................91
제 5장 결론............................................................................................................94
참고 문헌...................................................................................................................96
- Degree
- Master
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