미세 피치 Chip-on-Film 대응 검사 시스템 설계

Abstract

This paper presents a novel automatic defect detection system for COF (Chip-on Film)with fine width of less than 24㎛ and fine pitch of less than 30㎛.developed system can automatically detect variety of defects such hard open, hard short, mouse bite (soft open) and near short (soft short). Basic principles are to detect these faults using radio frequency resonator. This resonator amplifies resistance variation of interconnection from defects of fine patterns. It detects voltage differences between fault-free case and fault case. This approach based on an automatic defect detection system can save marginally failing COF in production testing as well as in the system, hence saving a tremendous amount of revenue from unnecessary COF replacements.