LCD제조공정에 적합한 부유미립자 포집장치 개발 및 특성에 관한 연구

Abstract

It is a well known fact that LCD is a central part of the IT industry which is important in the present and the future. But the biggest problem of LCD manufacturing is maintaining a cleaning room environment and administration. Therefore the purpose of this study is to prevent the damage of products. The dust collector is a type of particle reducer device. It protects against electrostatic attraction in the cleaning room environment and is a necessary environmental factor during LCD production. The dust collector includes a dust charging section and a dust collecting section. The dust charging section includes discharge electrode which is made up of a plurality of paralleled discharge wires, and a counter-electrode which is made up of a plurality of punched holes with a metal plate. The dust collecting section includes positive metal electrode and negative metal electrodes disposed alternately, and insulating spacers disposed between each of positive electrode and negative electrode.

The results are as follows; 1) In case of practicality and durability, the stainless steel electrode has a good at it's function than an aluminum electrode for a long-term period.

2) In case of observation about the change of the dust absorptivity, the more narrow wire, the better it's function. Coulomb force & density of electric field are higher at the same high voltage.

3) The more dimension of counter-electrode, the better the dust absorptivity. but in case of small size of it's hole, it would be disturbed to the air flow of the clean room. That's why it will be made as suitable hole size.

4) For the dust absorptivity steady-State DC high voltage is good compared with Pulse DC high voltage. According to the level of high voltage, Coulomb force & density of electric field are higher. That's why the dust absorptivity is improved by Coulomb force & density of electric field. But ozone generated quantity comes to be much. Consequently must consider the plan which minimizes an ozone occurrence quantity.

5) To confirm about the range of the dust collector we did the test according to the distance. Normally the dust absorptivity is relative to the distance. The more close, the better its function. As results, we should think about installation of safety panel which is concern with the dust absorptivity. The dust collector has to suitable installation according to each manufacture environment.